10nm Piezoelectric Nano Translation Stages Stage Size=70×105mm Travel=50mm | GU OPTICS
10nm Piezoelectric Nano Translation Stages Stage Size=70×105mm Travel=50mm

10nm Piezoelectric Nano Translation Stages Stage Size=70×105mm Travel=50mm

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Product No. 526802

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Stage Size 70×105mm
Travel 50
Motor Drive M304
Axial Thrust 16N
Max load 5kg
Max Speed 20mm/s
Minimum step 10nm
Repositioning Accuracy 0.3μm
Position Sensor Grating Rule
Straightness Accuracy <2μm
Parallelism of Motion <10μm
Material Aluminium Alloy, with Anodizing Treatment
Piezoelectric ultrasonic motor drive, axial thrust 16N Use stainless steel crossed-roller bearing, high precision, repeatability and linearity With power-off self-locking , brake function and no return backlash Minimum step 10nm Adopt grating ruler position sensor Ultra-thin compact design, convenient for mechanical integration, main body material is aluminium alloy, anodizing treatment
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