OptiSpheric® AutoFocus 1500
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Product No. 750136
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- 被测样品直径 3...75mm
- 有效通光孔径 50mm
- 测量范围（EFL） +5...+1000mm;-5...-1000mm
- 测量范围（MTF） 5...100mmEFL
- 测量范围（BFL） 5...500mm
- 测量范围（R） 5...500mm
- 测量精度（EFL） 5-25mm:0.1-0.3%;25-500mm:0.03-0.1%;500-2000mm:0.05-0.3%
- 测量精度（MTF） ±0.02
- 测量精度（BFL） 0.05...0.3%
- 测量精度（R） 0.05...0.3%
- 重复精度（EFL） 0.03...0.2%
- 重复精度（MTF） ±0.01
- 重复精度（BFL） 0.03...0.2%
- 重复精度（R） 0.03...0.2%
产品型号及技术指标
| 产品编号 | 750134 | 750135 | 750136 | 750137 | 750138 | 750139 | |
| 产品型号 | OptiSpheric® AutoFocus 500 | OptiSpheric® AutoFocus 1000 | OptiSpheric® AutoFocus 1500 | OptiSpheric® AutoFocus 2000 | OptiSpheric® MAN | OptiSpheric® L MAN | |
| 被测样品直径 | 5...35mm | 5...75mm | 5...75mm | 5...75mm | 5...35mm | 5...35mm | |
| 有效通光孔径 | 28mm | 48mm | 48mm | 43mm | 27mm | 27mm | |
| 测量范围 | EFL | +5...+450mm -5...-450mm | +5. ..+1000mm -5.. .-1000mm | +5.. .+1500mm -5.. .-1200mm | -5...-1500mm +5...+2000mm | ±5...250mm | +5...500mm |
| MTF | 5...50mm EFL | 5...50mm EFL | 5...50mm EFL | 5.. .50mm EFL | 5... 50mm | -5...-350mm | |
| BFL | ±5...±490mm | ±5 …±490mm | ±5...±750mm | ±5... ± 1000mm | —— | ±5...400mm | |
| R | ±5...400mm | ±5...400mm | ±5...400mm | ±5.. .400mm | —— | ±5...400mm | |
| 测量精度 | EFL | ±0.2% | ±0.2% | ±0.2% | ±0.2% | ±0.2% | ±0.2% |
| MTF | 0.02 | 0.02 | 0.02 | ±2% | ±2% | ±2% | |
| BFL | ±0.3% | ±0.3% | ±0.3% | ±0.3% | —— | —— | |
| R | ±0.3% | ±0.3% | ±0.3% | ±0.3% | —— | —— | |
| 重复精度 | EFL | 0.03...0.2% | 0.03...0.2% | 0.03...0.2% | 0.03...0.2% | 0.03...0.2% | 0.03...0.2% |
| MTF | ±1% | ±1% | ±1% | ±1% | ±1% | ±1% | |
| BFL | ±0.2% | ±0.2% | ±0.2% | ±0.2% | —— | —— | |
| R | ±0.2% | ±0.2% | ±0.2% | ±0.2% | —— | —— | |
扩展功能技术指标：
中心偏差测量
| 中心偏差测量 | OptiSpheric® AutoFocus 500 | OptiSpheric® AutoFocus 1000 | OptiSpheric® AutoFocus 1500 | OptiSpheric® AutoFocus 2000 | OptiSpheric® MAN | OptiSpheric® L MAN |
| 测量范围(R/EFL) |
+5... +450mm |
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| 扩展范围(R/EFL) |
±2000mm |
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| 测量精度 |
±2″ 或 ±0.2μm |
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| 重复精度 |
±1″ 或 ±0.1μm |
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平面光学元件角度测量
| 角度测量 | OptiSpheric® AutoFocus 500 | OptiSpheric® AutoFocus 1000 | OptiSpheric® AutoFocus 1500 | OptiSpheric® AutoFocus 2000 | OptiSpheric® MAN | OptiSpheric® L MAN |
| 测量精度 | ±1.3″ | |||||
| 重复精度 | ±0.2″ | |||||
| 分辨率 | 0.01″ | |||||
光学系统空气间隔测量
| 空气间隔 | OptiSpheric® AutoFocus 500 | OptiSpheric® AutoFocus 1000 | OptiSpheric® AutoFocus 1500 | OptiSpheric® AutoFocus 2000 | |
| 测量范围 | 200mm / 400mm / 600mm / 800mm光程可选 | ||||
| 测量精度 | ±0.15µm或±0.5µm或±1µm | ||||
| 测量速度 | 1.5″/10mm光程 | ||||
| 测量波长 | 1310 nm | ||||
