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Home  Products  OptiSpheric通用途光学测量仪（全自动数字测焦仪)  750138

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Parameters Related Products Description

被测样品直径 3...75mm

有效通光孔径 50mm

测量范围（EFL） +5...+2000mm;-5...-2000mm

测量范围（MTF） 5...100mmEFL

测量范围（BFL） 5...1000mm

测量范围（R） 5...1000mm

测量精度（EFL） 5-25mm:0.1-0.3%;25-500mm:0.03-0.1%;500-2000mm:0.05-0.3%

测量精度（MTF） ±0.02

测量精度（BFL） 0.05...0.3%

测量精度（R） 0.05...0.3%

重复精度（EFL） 0.03...0.2%

重复精度（MTF） ±0.01

重复精度（BFL） 0.03...0.2%

重复精度（R） 0.03...0.2%

产品型号及技术指标

产品编号		750134	750135	750136	750137	750138	750139
产品型号		OptiSpheric® AutoFocus 500	OptiSpheric® AutoFocus 1000	OptiSpheric® AutoFocus 1500	OptiSpheric® AutoFocus 2000	OptiSpheric® MAN	OptiSpheric® L MAN
被测样品直径		5...35mm	5...75mm	5...75mm	5...75mm	5...35mm	5...35mm
有效通光孔径		28mm	48mm	48mm	43mm	27mm	27mm
测量范围	EFL	+5...+450mm -5...-450mm	+5. ..+1000mm -5.. .-1000mm	+5.. .+1500mm -5.. .-1200mm	-5...-1500mm +5...+2000mm	±5...250mm	+5...500mm
	MTF	5...50mm EFL	5...50mm EFL	5...50mm EFL	5.. .50mm EFL	5... 50mm	-5...-350mm
	BFL	±5...±490mm	±5 …±490mm	±5...±750mm	±5... ± 1000mm	——	±5...400mm
	R	±5...400mm	±5...400mm	±5...400mm	±5.. .400mm	——	±5...400mm
测量精度	EFL	±0.2%	±0.2%	±0.2%	±0.2%	±0.2%	±0.2%
	MTF	0.02	0.02	0.02	±2%	±2%	±2%
	BFL	±0.3%	±0.3%	±0.3%	±0.3%	——	——
	R	±0.3%	±0.3%	±0.3%	±0.3%	——	——
重复精度	EFL	0.03...0.2%	0.03...0.2%	0.03...0.2%	0.03...0.2%	0.03...0.2%	0.03...0.2%
	MTF	±1%	±1%	±1%	±1%	±1%	±1%
	BFL	±0.2%	±0.2%	±0.2%	±0.2%	——	——
	R	±0.2%	±0.2%	±0.2%	±0.2%	——	——

扩展功能技术指标：

中心偏差测量

中心偏差测量	OptiSpheric® AutoFocus 500	OptiSpheric® AutoFocus 1000	OptiSpheric® AutoFocus 1500	OptiSpheric® AutoFocus 2000	OptiSpheric® MAN	OptiSpheric® L MAN
测量范围(R/EFL)	+5... +450mm
扩展范围(R/EFL)	±2000mm
测量精度	±2″ 或 ±0.2μm
重复精度	±1″ 或 ±0.1μm

平面光学元件角度测量

角度测量	OptiSpheric® AutoFocus 500	OptiSpheric® AutoFocus 1000	OptiSpheric® AutoFocus 1500	OptiSpheric® AutoFocus 2000	OptiSpheric® MAN	OptiSpheric® L MAN
测量精度	±1.3″
重复精度	±0.2″
分辨率	0.01″

光学系统空气间隔测量

空气间隔	OptiSpheric® AutoFocus 500	OptiSpheric® AutoFocus 1000	OptiSpheric® AutoFocus 1500	OptiSpheric® AutoFocus 2000
测量范围	200mm / 400mm / 600mm / 800mm光程可选
测量精度	±0.15µm或±0.5µm或±1µm
测量速度	1.5″/10mm光程
测量波长	1310 nm

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