System parameters and measurement accuracy |
Mirror interval measurement range |
400mm(Optical path)600mm(Optical path)800mm(Optical path) |
Mirror interval measurement accuracy |
±1μm |
±0.5μm |
±0.15μm |
Mirror interval repeat accuracy |
±0.5μm |
±0.25μm |
±0.075μm |
Center deviation measurement mode |
Reflection mode (transmission mode can be expanded) |
Center deviation measurement range(EFL or R) |
±5…±450mm(Can be extended to ±2000mm) |
Center deviation measurement accuracy |
±0.2μm or ±2" |
Center deviation repeatability |
±0.1μm or ±1″ |
Radius of curvature measurement accuracy |
0.3% |
Radius of curvature repeatability |
0.2% |
Maximum diameter of the tested lens |
225mm |