| System parameters and measurement accuracy | |
| Electronic autocollimator | Effective focal length500mm,diameter57mm |
| Accuracy of autocollimator | Resolution0.01,Repeatability±0.05 |
| Sample table bearing | Air bearing (compressed air required) |
| Encoder accuracy(in arcseconds) | 0.036,Absolute accuracy0.2 |
| Rotation method of sample stage | Manual / Auto |
| System accuracy(in arcseconds) | Single measurement0.5,Multiple measurements0.2 |
| Measurement procedure | Reflection measurement, transmission measurement (expandable), refractive index measurement (expandable) |

































































































































































