System parameters and measurement accuracy |
Electronic autocollimator |
Effective focal length500mm,diameter57mm |
Accuracy of autocollimator |
Resolution0.01,Repeatability±0.05 |
Sample table bearing |
Air bearing (compressed air required) |
Encoder accuracy(in arcseconds) |
0.036,Absolute accuracy0.2 |
Rotation method of sample stage |
Manual / Auto |
System accuracy(in arcseconds) |
Single measurement0.5,Multiple measurements0.2 |
Measurement procedure |
Reflection measurement, transmission measurement (expandable), refractive index measurement (expandable) |