System parameters and measurement accuracy | EFL | MTF | BFL | Radius of curvature | Center deviation |
Diameter of tested sample | 3~75mm | ||||
Effective clear aperture | 50mm | ||||
Measuring range | +5~+2000mm -5~-1500mm |
5~100mm EFL |
5~700mm | 5~700mm | +5~+750mm -5~-750mm |
Measurement accuracy | 2~25mm:0.1~0.3% 25~500mm:0.03~0.1% 500~2000mm:0.05~0.3% |
0.02 | 0.05~0.3% | 0.05~0.3% | ±2″ or 0.2μm |
Repeatability | 0.03~0.2% | 0.01 | 0.03~0.2% | 0.03~0.2% | ±2″ or 0.2μm |