Zygo Laser interferometer
Product testing
Function: Measure the radius of curvature, surface shape, and transmitted wavefront of flat, spherical, and cylindrical components
| GPI XP/D System parameters and measurement accuracy | |
| Measuring beam diameter | 4"(102mm) |
| Laser type | 632.8nm Class II helium-neon laser |
| Measurement repeatability | Lambda/100@632.8nm |
| RMS repeatability | 2Lambda/10000@632.8nm |
| Data sampling | 640x480px，8size（Scalable：1024x1024px） |
| Measurement accuracy Zygo GPI XP/D Standard lens performance parameters（Dia102mm） | |
| Flat standard lens accuracy | Lambda/20@632.8nm |
| Spherical standard lens accuracy | Lambda/10@632.8nm |
| Spherical standard lens F number | F/0.65,F/1.6,F/3.3,F/7.1 |
