System parameters and measurement accuracy | |
Diameter of tested sample | 10~150mm |
Encoder stroke | ±25mm |
Measuring range | Convex:﹢3mm~∞ Concave: -6~∞ |
Encoder resolution | 0.1um |
Encoder absolute accuracy | ±0.05um |
Curvature measurement accuracy | 0.005% |
Precision ball ring material | WC |
Ball ring size | 7.8mm,14mm,20mm,28mm,38mm, 45mm,60mm,75mm,90mm,120mm |
Flat crystal size | Φ12mm@λ/10;Φ20mm@λ/10;Φ25mm@λ/10; Φ30mm@λ/10;Φ50mm@λ/10;Φ100mm@λ/5; |